Belgia – Echipamente de laborator, optice şi de precizie (cu excepţia ochelarilor) – 2 PVD systemen en materiaal

For Lot 2, the price score will be calculated on the basis of the total cost of ownership for the one-off purchase of the PVD system for the UGent cleanroom, as stated in the completed inventory for Lot 2 and the tenderer’s offer. The score will be calculated using the rule of three: score = (lowest TCO / tenderer’s TCO) × weight of the criterion. The odds are rounded up to 2 digits after the comma. The assessment of the technical quality will include, but is not limited to these specific items: • Suitability for magnetic and oxide thin-film deposition; • Technical and professional competence of the tenderer (as described above) ; • substrate heating and rotation capabilities; • wedge deposition functionality; • Description on how the gas is introduced to the substrate platen for reactive sputtering • rolling shutter implementation and gradient control; • co-deposition capabilities; • automation and process reproducibility; • thickness monitoring and process control; • upgradeability and future expandability; • demonstrated scientific performance and maturity of the proposed system. • Option for plasma etching capabilities Vereiste opties (• Tenderers must offer, as a separately priced required option for Lot 2, a preventive maintenance contract, where applicable.) Raad Van State Gebruikersvriendelijkheid 2 PVD systemen en materiaal a thin film physical vapor deposition system in the UGent cleanroom Prijs De opdrachtdocumenten zijn aangepast op 12/08/26, zie bijkomend document met extra toelichting: document "questions on the specifications" PROCEDURE - De uiterste datum voor indiening offertes is aangepast naar 04 ••• ••• 00). • Quality and feasibility of the action plan regarding delivery and installation • Warranty and maintenance conditions, inc. response times • Training offered and to what extent maintenance of the tool is possible by UGent staff • Service contract conditions Kwaliteit Submit a reference list with at least 1 reference from the past 3 years, where a similar device was delivered, including explicit mention of the contact person (name + telephone number) for this reference. Minimumeisen: at least 1 reference from the past 3 years, where a similar device was delivered, To facilitate exploratory research in the UGent cleanroom, a new physical vapor deposition (PVD) system is required which can handle substrates of at least 100 mm size. The PVD system will be shared between the photonics research group (PRG) and liquid crystals and photonics (LCP) research groups to deposit a wide range of (mostly) metal or dielectric thin films. Included in the assignment is the start-up and installation of the tool, as well as a load-lock for faster loading of the samples and training by the equipment provider. A 100 mm PVD thin film deposition system, with both e-gun evaporation and sputtering sources and a load-lock. The contracting authority intends to purchase a high-quality thin-film deposition system for advanced materials research within the framework of the ERC-funded project THERMAGINE. The system will be used for the deposition and engineering of magnetic metallic and oxide thin films and multilayer stacks with nanometer-scale thickness control. The equipment will primarily be used for the fabrication of magnetic (multilayer) thin films and wedges for nanomagnetic research. The system must therefore provide a high degree of flexibility, reproducibility, process stability and automation. Technische meerwaarde Lot 1 Explanation The contracting authority intends to purchase a high-quality thin-film deposition system for advanced materials research within the framework of the ERC-funded project THERMAGINE. The system will be used for the deposition and engineering of magnetic metallic and oxide thin films and multilayer stacks with nanometer-scale thickness control. The equipment will primarily be used for the fabrication of magnetic (multilayer) thin films and wedges for nanomagnetic research. The system must therefore provide a high degree of flexibility, reproducibility, process stability and automation. For Technical details see part III Lot 2 Explanation To facilitate exploratory research in the UGent cleanroom, a new physical vapor deposition (PVD) system is required which can handle substrates of at least 100 mm size. The PVD system will be shared between the photonics research group (PRG) and liquid crystals and photonics (LCP) research groups to deposit a wide range of (mostly) metal or dielectric thin films. Included in the assignment is the start-up and installation of the tool, as well as a load-lock for faster loading of the samples and training by the equipment provider. A 100 mm PVD thin film deposition system, with both e-gun evaporation and sputtering sources and a load-lock. Lot 3 Explanation First-year consumables for Lot 2. Lot 3 concerns the one-off purchase of the consumables specifically required for the PVD system described under Lot 2 and for use in the UGent cleanroom during the first year of operation. The inventory must include at least gold for sputtering targets, titanium for sputtering targets. gold for e-gun evaporation and titanium for e-gun evaporation. Other consumables used in lower quantities, such as aluminium, nickel, platinum, aluminium oxide, chromium and similar materials, may be offered as optional additional items but are not mandatory. Total Cost of Ownership (TCO) 3P - Aanbieder van diensten / Prestataire de services Service, support en onderhoud FPS Policy and Support The different bids will be scored based on the following service criteria: • Maintenance, service, and support, e.g., service levels offered such as response times, service center availability, number of technicians available, hourly rates, possibility of scientific support, terms and conditions of possible/offered maintenance contracts, etc. • Ease of maintenance, cleaning, and disinfection options • Training offered/included The different bids will be scored based on the following user-friendly criteria: • User-friendly interface • Ease of recovery/reclaim of deposited metals • The time it takes to pump/vent to load lock in order to load samples in the deposition tool • Compactness of the system to preserve precious cleanroom real estate Extra only for lot 1 A list of academic publications, where the work was executed using an identical or similar equipment. Minimumeisen: The tenderer shall provide at least five references to peer-reviewed scientific publications from the past five years demonstrating the use of an identical or substantially similar physical vapor deposition system. These references will be used to assess the scientific quality, technological maturity and research suitability of the proposed equipment. Universiteit Gent The different bids will be scored based on the following quality criteria: • Proven uniformity of deposited layer thickness on a flat 100mm silicon wafer for e-beam evaporation • Proven uniformity of deposited layer thickness on a flat 100mm silicon wafer for sputtering • Step coverage performance for sputtering on 100mm substrates • Proven ability to perform a lift-off process through e-gun evaporation for metal thicknesses up to 500 nm with features that are at least 3 µm apart. a high-quality thin-film deposition system for advanced materials research For Lot 3, the price score will be calculated on the basis of the total cost for the one-off first-year consumables package for the PVD system described under Lot 2 as stated in the completed inventory for Lot 3 and the tenderer’s offer. The score will be calculated using the rule of three: score = (lowest total cost for Lot 3 / tenderer’s total cost for Lot 3) × weight of the criterion. The total cost for Lot 3 shall include only the mandatory consumables included in the inventory for Lot 3 and all costs inherent to their one-off supply, including, where applicable, packaging suitable for cleanroom use, transport, insurance, unloading, documentation, certificates of analysis or equivalent quality documentation, and any other costs necessary for complete delivery of the first-year consumables package. For Lot 1, the price score will be calculated on the basis of the total cost of ownership for the one-off purchase of the research-grade thin-film PVD system, as stated in the completed inventory for Lot 1 and the tenderer’s offer. The score will be calculated using the rule of three: score = (lowest TCO / tenderer’s TCO) × weight of the criterion. The odds are rounded up to 2 digits after the comma. Vereiste opties (• Tenderers must offer, as a separately priced required option for Lot 1, a preventive maintenance contract, where applicable. • Tenderers must offer, as a separately priced required option for Lot 1, possible extras for the turbomolecular pump, including a magnetically levitated pump.) Submit proof of such insurance or, where applicable, a bank statement. first-year consumables for Lot 2 * Het UEA, waarmee de ondernemer verklaart dat hij zich niet bevindt in een van de uitsluitingssituaties als bedoeld in de artikelen 67 tot 69 van de wet van 17 juni 2016. Artikel 70 van de wet van 17 juni 2016 betreffende de overheidsopdrachten is van toepassing. Voor de in artikel 67 van de wet bedoelde uitsluitingsgronden deelt de gegadigde of inschrijver op eigen initiatief mee of hij bij het begin van de procedure de in artikel 70, lid 1, bedoelde corrigerende maatregelen heeft genomen. Organisatie die informatie verstrekt over beroepsprocedures en bijhorende termijnen: Raad Van State Vakgroep Elektronica en informatiesystemen jaarrekening afgelopen jaar Minimumeisen: Submit the annual accounts of the last financial year. 01 education Brussel 2026-09-04+02:00 poi-exa none BE100 Wetenschapsstraat 33 required supplies 90 10 1263cf7a-4f28-430b-8d1f-6d1aeb894d47-01 ••• ••• 14+02:00 quality 32014L0024 slc-abil-ref-supply BE234 3 Technologiepark Zwijnaarde 126 5 slc-stand-to-avg BE 04 ••• ••• 36 [telefon eliminat] non-restricted-document body-pl 4dc61aef-a2da-4a91-93d5-861906e47fc7 NLD https://www.publicprocurement.be 1000 eforms-sdk-1.13 9[telefon eliminat] eu-funds PROCEDURE Gent BE 06 ••• ••• 47 not-requ BEL 14:00:00+02:00 BE211 [telefon eliminat] ted-esen Sint-Pietersnieuwstraat 25 open Isolde De Grem DOC 01 [telefon eliminat] ERC Project THERMAGINE ORG-0003 ORG-0004 cn-standard 50 ORG-[telefon eliminat]+02:00 ORG-0002 PPP01G-3521/6598/26OPE019 Brussels Antwerpen / Anvers https://cloud.3p.eu/Downloads/1/3521/1G/2026 2000 [email eliminat] epo-notice no-eu-funds true 14523200 60 ENG no http://www.ugent.be/ [email eliminat] [email eliminat] 156/2026 1040 not-allowed LOT-0001 LOT-0003 LOT-0002 update-add d53a75e8-c580-4a11-9920-6ed958908dd2 2026-10-01+02:00 epo-procurement-document slc-stand-ins 00:00:00+02:00 cost serv-prov [telefon eliminat] false [telefon eliminat] Zwijnaarde 9052 http://www.raadvst-consetat.be/ 02 ••• ••• 42 slc-stand-other beleidsmedewerker aankoopbeleid [email eliminat] 26OPE019_1 UNKNOWN 26OPE019_2 26OPE019_3